System: tetrachlorosilane/chlorotrimethylsilane/trichloromethylsilane
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| 1) tetrachlorosilane |
| DECHEMA ID | 170 |
| Formula | Cl4Si |
| Synonym | z-1229 |
| Synonym | silicon(IV) chloride |
| Synonym | tetrachlorosilicon |
| Synonym | silicium tetrachloride |
| Synonym | perchlorosilane |
| Synonym | silicon-IV-chloride |
| Synonym | silicon chloride |
| Synonym | silicon chloride (SiCl4) |
| Synonym | silicon tetrachloride |
| InChi-Key | FDNAPBUWERUEDA-UHFFFAOYSA-N |
| Registry No. | 10026-04-7 |
| 2) chlorotrimethylsilane |
| DECHEMA ID | 40193 |
| Formula | C3H9ClSi |
| Synonym | trimethylsilane chloride |
| Synonym | monochlorotrimethylsilicon |
| Synonym | me3sicl |
| Synonym | z-1224 |
| Synonym | chlorotrimethylsilicane |
| Synonym | trimethylsilyl chloride |
| Synonym | trimethylchlorosilane |
| InChi-Key | IJOOHPMOJXWVHK-UHFFFAOYSA-N |
| Registry No. | 75-77-4 |
| 3) trichloromethylsilane |
| DECHEMA ID | 40195 |
| Formula | CH3Cl3Si |
| Synonym | methyl trichlorosilane |
| Synonym | methylsilicon trichloride |
| Synonym | z-1211 |
| Synonym | methylsilyl trichloride |
| Synonym | methyl silico chloroform |
| Synonym | methylsiliciumtrichloride |
| Synonym | mesicl3 |
| Synonym | methyltrichlorosilane |
| InChi-Key | DWAWYEUJUWLESO-UHFFFAOYSA-N |
| Registry No. | 75-79-6 |
Available physical property data:
| Property | Phase | No. of tables | No. of lines | Data |
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| density | liquid | 1 | 3 | View |
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| density | gas | 1 | 24 | View |
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| PVT-data | - | 1 | 24 | View |
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| vapor-liquid equilibrium | - | 1 | 24 | View |
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